Development of Mechanical Testing Machine for Microelements and Fracture Strength Evaluation of Single-Crystalline Silicon Microelements.
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ژورنال
عنوان ژورنال: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A
سال: 1994
ISSN: 0387-5008,1884-8338
DOI: 10.1299/kikaia.60.52